<?xml version="1.0" encoding="utf-8"?>
<export-example>
  <doc>
    <id>1786</id>
    <completedYear>2023</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Evaluation of fabrication methods for Fabry-Perot polymer film ultrasound sensors</title>
    <abstract language="eng">Fabry-Pèrot (FP) interferometer sensors enable highly sensitive backward mode acoustic detection in Photoacoustic (PA) imaging. They are transparent to the excitation wavelength, can be placed directly next to the PA source, and offer a broadband frequency response and high acoustic sensitivity. PA tomography using parallelized detection requires high spatial uniformity of the optical and acoustic properties, which can be hampered by contaminations during fabrication that lead to the formation of inhomogeneities and artefacts. The quality and homogeneity of the dielectric and polymer layers have a direct effect on the maximum optical phase sensitivity, and hence acoustic sensitivity. In this study, cross-sectional images of FP sensors were obtained using focused ion beam milling and ultramicrotomy followed by Scanning Electron Microscopy (SEM) and Transmission Electron Microscopy (TEM) to evaluate different fabrication methods.</abstract>
    <parentTitle language="eng">Opto-Acoustic Methods and Applications in Biophotonics VI</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-17864</identifier>
    <enrichment key="opus.import.data">@inproceedings10.1117/12.2675592, author = Werner Lebek and Frank Heyroth and Frank Syrowatka and Claus Villringer and Sylvia Goerlitz and Jan Laufer, title = Evaluation of fabrication methods for Fabry-Perot polymer film ultrasound sensors, volume = 12631, booktitle = Opto-Acoustic Methods and Applications in Biophotonics VI, editor = Chulhong Kim and Jan Laufer and Vasilis Ntziachristos and Roger J. Zemp, organization = International Society for Optics and Photonics, publisher = SPIE, pages = 126310Y, keywords = Photoacoustic imaging, Fabry-Perót sensor, Parylene-C, Focus ion beam, Electron microscopy, year = 2023, doi = 10.1117/12.2675592, URL = https://doi.org/10.1117/12.2675592</enrichment>
    <enrichment key="opus.import.dataHash">md5:8b04f22215e9baf42477b6dfa4ebbf5b</enrichment>
    <enrichment key="opus.import.date">2023-08-31T07:45:51+00:00</enrichment>
    <enrichment key="opus.import.file">/tmp/phppGhzZx</enrichment>
    <enrichment key="opus.import.format">bibtex</enrichment>
    <enrichment key="opus.import.id">64f0452f2eba79.83547920</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2023 Society of Photo‑Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this publication for a fee or for commercial purposes, and modification of the contents of the publication are prohibited.</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2675592</enrichment>
    <enrichment key="SourceTitle">Werner Lebek, Frank Heyroth, Frank Syrowatka, Claus Villringer, Sylvia Goerlitz, and Jan Laufer "Evaluation of fabrication methods for Fabry-Perot polymer film ultrasound sensors", Proc. SPIE 12631, Opto-Acoustic Methods and Applications in Biophotonics VI, 126310Y (11 August 2023). DOI: https://doi.org/10.1117/12.2675592</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Werner Lebek</author>
    <author>Frank Heyroth</author>
    <author>Frank Syrowatka</author>
    <author>Claus Villringer</author>
    <author>Sylvia Goerlitz</author>
    <author>Jan Laufer</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>photoacoustic imaging</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>Fabry-Perot sensor</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>parylene-C</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>cocus ion beam</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>electron microscopy</value>
    </subject>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1786/126310Y.pdf</file>
  </doc>
</export-example>
