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<export-example>
  <doc>
    <id>1522</id>
    <completedYear>2010</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>330</pageFirst>
    <pageLast>339</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>Society of Photo-Optical Instrumentation Engineers (SPIE)</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Photonic crystal microcavities in SOI waveguides produced in a CMOS environment</title>
    <abstract language="eng">We have investigated microcavities in Silicon-on-Insolator (SOI) waveguides. The rectangular waveguides with 500 nm width are fabricated in the 220 nm silicon device layer. The microcavities are formed by one-dimensional photonic crystals in Fabry-Perot structure directly written in the waveguides. The SOI photonic structures are produced in a CMOS environment using 248 nm DUV lithography, where the waveguides as well as the photonic crystals are created in the same step using a single mask. In order to achieve a desired spectral shape of the filter function capable for several applications, a number of different cavities were investigated, e.g. single cavities of first and higher order as well as multi-cavity filters. The experimental results are compared with simulations of photonic crystal microcavities in strip waveguides. The spectral transmission function of such filters dependent on the design parameters are calculated by an analysis based on Finite-Difference-Time-Domain (FDTD) method.</abstract>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-15223</identifier>
    <enrichment key="opus.import.date">2021-09-16T10:30:39+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=php2RprwJ</enrichment>
    <enrichment key="opus.import.checksum">b5c5cdb672a5a9a89f40c02aa000197d</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.842714</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2010 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">Stefan Meister, Aws Al-Saadi, Bülent A. Franke, Shaimaa Mahdi, Berndt Kuhlow, Karsten Voigt, Bernd Tillack, Harald H. Richter, Lars Zimmermann, Viachaslau Ksianzou, Sigurd K. Schrader, and Hans J. Eichler "Photonic crystal microcavities in SOI waveguides produced in a CMOS environment", Proc. SPIE 7606, Silicon Photonics V, 760616 (16 February 2010); https://doi.org/10.1117/12.842714</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Stefan Meister</author>
    <author>Aws Al-Saadi</author>
    <author>Bülent A. Franke</author>
    <author>Shaimaa Mahdi</author>
    <author>Berndt Kuhlow</author>
    <author>Karsten Voigt</author>
    <author>Bernd Tillack</author>
    <author>Harald H. Richter</author>
    <author>Lars Zimmermann</author>
    <author>Viachaslau Ksianzou</author>
    <author>Sigurd Schrader</author>
    <author>Hans J. Eichler</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>silicon photonics</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>SOI waveguide</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>photonic crystal</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>band-pass filter</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>microcavity</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>FDTD simulation</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieurwesen / Wirtschaftsingenieurwesen (bis 8/2014)</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1522/760616.pdf</file>
  </doc>
  <doc>
    <id>1523</id>
    <completedYear>2011</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>199</pageFirst>
    <pageLast>204</pageLast>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName>Society of Photo-Optical Instrumentation Engineers (SPIE)</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Micro-cavities based on width modulated SOI waveguides</title>
    <abstract language="eng">We have designed, fabricated and investigated one-dimensional (1D) micro-cavities in Silicon-on-Insulator (SOI) waveguides. The single mode waveguides are fabricated in a 220 nm silicon device layer. The 1D micro-cavities in Fabry-Perot structure consist of two Bragg-mirror regions formed by a sinusoidal modulation of the waveguide width. The mirror regions are separated by a sub-micron spacer. The SOI photonic structures are produced in a CMOS environment using 248 nm DUV lithography. The waveguides as well as the width modulated mirror regions are designed using a single mask and are fabricated in a shallow trench process. The transmission spectra of these width modulated micro-cavities with different mirror reflectivities and cavity lengths are investigated. Q-factors up to 855 could be observed at 1550 nm wavelength with low insertion loss of 1.9 dB. The width modulated micro-cavities, including the mirror regions, have lengths of less than 20 microns and widths of maximum 450 nm. These small foot-print cavities act as band pass filters and can be used as resonators for laser or electro-optic modulation of light.</abstract>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-15233</identifier>
    <enrichment key="opus.import.date">2021-09-16T11:05:21+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="opus.import.file">filename=php7RbsdC</enrichment>
    <enrichment key="opus.import.checksum">a1dd77aa180364387788548eb6c5b4a3</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.875652</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">Stefan Meister, Aws Al-Saadi, Bülent A. Franke, Shaimaa Mahdi, Miroslaw Szczambura, Berndt Kuhlow, Ulrike Woggon, Lars Zimmermann, Harald H. Richter, David Stolarek, Sigurd K. Schrader, and Hans J. Eichler "Micro-cavities based on width modulated SOI waveguides", Proc. SPIE 7943, Silicon Photonics VI, 79430T (17 January 2011); https://doi.org/10.1117/12.875652</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Stefan Meister</author>
    <author>Aws Al-Saadi</author>
    <author>Bülent A. Franke</author>
    <author>Shaimaa Mahdi</author>
    <author>Miroslaw Szczambura</author>
    <author>Berndt Kuhlow</author>
    <author>Ulrike Woggon</author>
    <author>Lars Zimmermann</author>
    <author>Harald H. Richter</author>
    <author>David Stolarek</author>
    <author>Sigurd Schrader</author>
    <author>Hans J. Eichler</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>silicon photonics</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>CMOS</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>SOI waveguide</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>micro-cavity</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>micro-resonator</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>band-pass filter</value>
    </subject>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="institutes" number="">Fachbereich Ingenieurwesen / Wirtschaftsingenieurwesen (bis 8/2014)</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1523/79430T.pdf</file>
  </doc>
</export-example>
