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  <doc>
    <id>1684</id>
    <completedYear>2021</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>preprint</type>
    <publisherName/>
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    <title language="eng">Silicon Photonic Micro-Ring Resonators for Chemical and Biological Sensing: A Tutorial</title>
    <abstract language="eng">Silicon photonic micro-ring resonators (MRR) developed on the silicon-on-insulator (SOI) platform, owing to their high sensitivity and small footprint, show great potential for many chemical and biological sensing applications such as label-free detection in environmental monitoring, biomedical engineering, and food analysis. In this tutorial, we provide the theoretical background and give design guidelines for SOI-based MRR as well as examples of surface functionalization procedures for label-free detection of molecules.&#13;
After introducing the advantages and perspectives of MRR, fundamentals of MRR are described in detail, followed by an introduction to the fabrication methods, which are based on a complementary metal-oxide semiconductor (CMOS) technology. Optimization of MRR for chemical and biological sensing is provided, with special emphasis on the optimization of waveguide geometry. At this point, the difference between chemical bulk sensing and label-free surface sensing is explained, and definitions like waveguide sensitivity, ring sensitivity, overall sensitivity as well as the limit of detection (LoD) of MRR are introduced. Further, we show and explain chemical bulk sensing of sodium chloride (NaCl) in water and provide a recipe for label-free surface sensing.</abstract>
    <parentTitle language="deu">TechRxiv</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-16840</identifier>
    <enrichment key="opus.import.data">@articleSteglich2021, author = "Patrick Steglich and Dominik G. Rabus and Cinzia Sada and Martin Paul and Michael G. Weller and Christian Mai and Andreas Mai", title = "Silicon Photonic Micro-Ring Resonators for Chemical and Biological Sensing: A Tutorial", year = "2021", month = "7", url = "https://www.techrxiv.org/articles/preprint/Silicon_Photonic_Micro-Ring_Resonators_for_Chemical_and_Biological_Sensing_A_Tutorial/14909901", doi = "10.36227/techrxiv.14909901.v1"</enrichment>
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    <enrichment key="opus.import.date">2022-12-22T09:50:39+00:00</enrichment>
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    <enrichment key="opus.import.format">bibtex</enrichment>
    <enrichment key="opus.import.id">63a4286fc70bc9.43438905</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.36227/techrxiv.14909901.v1</enrichment>
    <enrichment key="SourceTitle">Steglich, Patrick; Rabus, Dominik G.; Sada, Cinzia; Paul, Martin; Weller, Michael G.; Mai, Christian; et al. (2021): Silicon Photonic Micro-Ring Resonators for Chemical and Biological Sensing: A Tutorial. TechRxiv. Preprint. https://doi.org/10.36227/techrxiv.14909901.v1</enrichment>
    <enrichment key="RelatedIdentifier">https://doi.org/10.1109/JSEN.2021.3119547</enrichment>
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    <licence>Creative Commons - CC BY - Namensnennung 4.0 International</licence>
    <author>Patrick Steglich</author>
    <author>Dominik G. Rabus</author>
    <author>Cinzia Sada</author>
    <author>Martin Paul</author>
    <author>Michael G. Weller</author>
    <author>Christian Mai</author>
    <author>Andreas Mai</author>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="3">Diamond Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1684/Silicon_Photonic_Micro_Ring_Resonators.pdf</file>
  </doc>
  <doc>
    <id>1364</id>
    <completedYear>2020</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>1241</pageFirst>
    <pageLast>1244</pageLast>
    <pageNumber/>
    <edition/>
    <issue>19</issue>
    <volume>32</volume>
    <type>article</type>
    <publisherName/>
    <publisherPlace/>
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    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">CMOS-Compatible Silicon Photonic Sensor for Refractive Index Sensing Using Local Back-Side Release</title>
    <abstract language="eng">Silicon photonic sensors are promising candidates for lab-on-a-chip solutions with versatile applications and scalable production prospects using complementary metal-oxide semiconductor (CMOS) fabrication methods. However, the widespread use has been hindered because the sensing area adjoins optical and electrical components making packaging and sensor handling challenging. In this work, a local back-side release of the photonic sensor is employed, enabling a separation of the sensing area from the rest of the chip. This approach allows preserving the compatibility of photonic integrated circuits in the front-end of line and metal interconnects in the back-end of line. The sensor is based on a micro-ring resonator and is fabricated on wafer-level using a CMOS technology. We revealed a ring resonator sensitivity for homogeneous sensing of 106 nm/RIU.</abstract>
    <parentTitle language="eng">IEEE Photonics Technology Letters</parentTitle>
    <identifier type="issn">1941-0174</identifier>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-13649</identifier>
    <enrichment key="opus.source">publish</enrichment>
    <enrichment key="SourceTitle">Steglich, P., Bondarenko, S., Mai, C., Paul, M., Weller, M., &amp; Mai, A. (2020). CMOS-Compatible Silicon Photonic Sensor for Refractive Index Sensing Using Local Back-Side Release IEEE Photonics Technology Letters. 32 (19), 1241-1244.</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1109/LPT.2020.3019114</enrichment>
    <licence>Creative Commons - CC BY - Namensnennung 4.0 International</licence>
    <author>Patrick Steglich</author>
    <author>Siegfried Bondarenko</author>
    <author>Christian Mai</author>
    <author>Martin Paul</author>
    <author>Michael G. Weller</author>
    <author>Andreas Mai</author>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="4">Hybrid Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1364/09175013.pdf</file>
  </doc>
  <doc>
    <id>1392</id>
    <completedYear>2021</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing</title>
    <abstract language="eng">In this work, a cost-effective optofluidic system is propossed and preliminary experimental results are presented. A microfluidic channel monolithically integrated into a photonic integrated circuit technology is used in conjunc- tion with a cyclo-olefin copolymer (COC) substrate to provide fluidic in- and output ports. We report on initial experimental results as well as on the simple and cost-effective fabrication of this optofluidic system by means of micro-milling.</abstract>
    <parentTitle language="eng">Proc. SPIE 11772, Optical Sensors 2021</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-13925</identifier>
    <enrichment key="opus.source">publish</enrichment>
    <enrichment key="CopyrightInfo">Copyright 2021 Society of Photo-Optical Instrumentation Engineers (SPIE). One print or electronic copy may be made for personal use only. Systematic reproduction and distribution, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited.</enrichment>
    <enrichment key="SourceTitle">Patrick Steglich, Martin Paul, Christian Mai, Andrea Böhme, Siegfried Bondarenko, Michael G. Weller, and Andreas Mai "A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing", Proc. SPIE 11772, Optical Sensors 2021, 1177206 (18 April 2021); https://doi.org/10.1117/12.2588791</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.2588791</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Patrick Steglich</author>
    <author>Martin Paul</author>
    <author>Christian Mai</author>
    <author>Andrea Böhme</author>
    <author>Siegfried Bondarenko</author>
    <author>Michael G. Weller</author>
    <author>Andreas Mai</author>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/1392/1177206.pdf</file>
  </doc>
  <doc>
    <id>2044</id>
    <completedYear>2025</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>13527</volume>
    <type>conferenceobject</type>
    <publisherName>SPIE</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>--</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Optimization of local backside released micro-ring resonators for sensing applications using silicon photonic integrated circuits in a SOI technology</title>
    <abstract language="eng">Photonic micro-ring resonators (MRR) are widely studied for their high sensitivity across applications like environmental monitoring, healthcare, and chemical analysis. Their evanescent field sensing requires partially unembedded waveguides compatible with CMOS processing. Our approach uses local backside etching with an additional buried oxide (BOX) etch to release waveguides while preserving the back-end of line (BEOL) structure, enabling spatial separation of the sensing area and electronics. The BOX etch critically affects sensor performance, as waveguide surface roughness can alter MRR properties and coupling. We analyzed MRR design variations, comparing wet and dry etching techniques for their effects on optical performance across rib and strip waveguides in quasi-TE and quasi-TM modes. Wafer-level measurements show that backside-released MRR achieve high extinction ratios with slightly reduced quality factors, advancing high-sensitivity photonic sensors.</abstract>
    <parentTitle language="eng">Proceedings of SPIE : Optical Sensors 2025</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-20449</identifier>
    <enrichment key="opus.import.date">2025-06-02T09:21:43+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="SourceTitle">Tabea Fünning, Anna Peczek, Aleksandra Kroh, Christian Mai, Martin Paul, Florian Thomsen, Robert Tannenberg, Christoph Schumann, Michael G. Weller, Andreas Mai, and Patrick Steglich "Optimization of local backside released micro-ring resonators for sensing applications using silicon photonic integrated circuits in a SOI technology", Proc. SPIE 13527, Optical Sensors 2025, 135270U (23 May 2025); https://doi.org/10.1117/12.3056481</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1117/12.3056481</enrichment>
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    <enrichment key="opus.urn.autoCreate">true</enrichment>
    <licence>Das Dokument ist urheberrechtlich geschützt.</licence>
    <author>Tabea Fünning</author>
    <author>Anna Peczek</author>
    <author>Aleksandra Kroh</author>
    <author>Christian Mai</author>
    <author>Martin Paul</author>
    <author>Florian Thomsen</author>
    <author>Robert Tannenberg</author>
    <author>Christoph Schumann</author>
    <author>Michael G. Weller</author>
    <author>Andreas Mai</author>
    <author>Patrick Steglich</author>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>photonic sensor</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>micro-ring resonator (MRR)</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>silicon-on-insulator (SOI)</value>
    </subject>
    <subject>
      <language>eng</language>
      <type>uncontrolled</type>
      <value>local backside etching (LBE)</value>
    </subject>
    <collection role="ddc" number="535">Licht, Infrarot- und Ultraviolettphänomene</collection>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="2">Green Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/2044/135270U.pdf</file>
  </doc>
  <doc>
    <id>2056</id>
    <completedYear>2025</completedYear>
    <publishedYear/>
    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst/>
    <pageLast/>
    <pageNumber/>
    <edition/>
    <issue/>
    <volume>15</volume>
    <type>article</type>
    <publisherName>Springer Nature</publisherName>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>1</belongsToBibliography>
    <completedDate>--</completedDate>
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    <title language="eng">Comparative simulation analysis of photonic ultrasound sensors based on silicon waveguides</title>
    <abstract language="eng">Pressure sensors based on photonic integrated circuits (PIC) offer the prospect of outstanding sensitivities, extreme miniaturization and have the potential for highly scalable production using CMOS compatible processing. PIC-based pressure sensors detect the change in optical properties, i.e. the intensity or phase of the optical carrier wave inside miniaturized waveguide structures. The detection of ultrasound is achieved by engineering the waveguide architecture such that a pressure causes a high change in the effective refractive index of the waveguide. A range of PIC-based pressure sensors have been reported, but a comparison of the sensitivity of the different approaches is not straightforward, since different pressure sensitive waveguide architectures as well as photonic layouts and measurement setups impact the performance. Additionally, the used sensitivity unit is not uniform throughout the different studies, further complicating a comparison. In this work, a detailed simulation study is carried out by finite element modeling of different pressure sensitive waveguide architectures for a consistent comparison. We analyze three different sensor architectures: (A) a free standing membrane located within a tiny air gap above the waveguide, (B) a waveguide located on top of a deflectable membrane as well as (C) a waveguide embedded inside a pressure-sensitive polymer cladding. The mechanical response of the structures and the resulting changes in mode propagation, i.e. the change of the effective refractive index, are analyzed. The waveguide sensitivities in RIU/MPa for different waveguide types (strip, slot) and polarization states (TE, TM) are compared. The results reveal inherent limitations of the different waveguide designs and create a basis for the selection of suitable designs for further ultrasound sensor development. Possibilities for enhancing waveguide sensitivity are identified and discussed. Additionally, we have shown that the studied approaches are extensible to SiN waveguides.</abstract>
    <parentTitle language="eng">Scientific Reports</parentTitle>
    <identifier type="urn">urn:nbn:de:kobv:526-opus4-20560</identifier>
    <enrichment key="opus.import.date">2025-06-23T06:54:07+00:00</enrichment>
    <enrichment key="opus.source">sword</enrichment>
    <enrichment key="opus.import.user">sword</enrichment>
    <enrichment key="DOI_VoR">https://doi.org/10.1038/s41598-025-01953-9</enrichment>
    <enrichment key="SourceTitle">Fünning, T., Paul, M., Manganelli, C.L. et al. Comparative simulation analysis of photonic ultrasound sensors based on silicon waveguides. Sci Rep 15, 20094 (2025). https://doi.org/10.1038/s41598-025-01953-9</enrichment>
    <enrichment key="opus.doi.autoCreate">false</enrichment>
    <enrichment key="opus.urn.autoCreate">true</enrichment>
    <licence>Creative Commons - CC BY-NC-ND - Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International</licence>
    <author>Tabea Fünning</author>
    <author>Martin Paul</author>
    <author>Costanza Lucia Manganelli</author>
    <author>Christian Wenger</author>
    <author>Andreas Mai</author>
    <author>Patrick Steglich</author>
    <collection role="ddc" number="620">Ingenieurwissenschaften und zugeordnete Tätigkeiten</collection>
    <collection role="ddc" number="621">Angewandte Physik</collection>
    <collection role="institutes" number="">Fachbereich Ingenieur- und Naturwissenschaften</collection>
    <collection role="open_access" number="">open_access</collection>
    <collection role="Import" number="import">Import</collection>
    <collection role="green_open_access" number="1">Gold Open Access</collection>
    <thesisPublisher>Technische Hochschule Wildau</thesisPublisher>
    <file>https://opus4.kobv.de/opus4-th-wildau/files/2056/s41598-025-01953-9.pdf</file>
  </doc>
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