@inproceedings{MeisterAlSaadiFrankeetal.2011, author = {Meister, Stefan and Al-Saadi, Aws and Franke, B{\"u}lent A. and Mahdi, Shaimaa and Szczambura, Miroslaw and Kuhlow, Berndt and Woggon, Ulrike and Zimmermann, Lars and Richter, Harald H. and Stolarek, David and Schrader, Sigurd and Eichler, Hans J.}, title = {Micro-cavities based on width modulated SOI waveguides}, publisher = {Society of Photo-Optical Instrumentation Engineers (SPIE)}, url = {http://nbn-resolving.de/urn:nbn:de:kobv:526-opus4-15233}, pages = {199 -- 204}, year = {2011}, abstract = {We have designed, fabricated and investigated one-dimensional (1D) micro-cavities in Silicon-on-Insulator (SOI) waveguides. The single mode waveguides are fabricated in a 220 nm silicon device layer. The 1D micro-cavities in Fabry-Perot structure consist of two Bragg-mirror regions formed by a sinusoidal modulation of the waveguide width. The mirror regions are separated by a sub-micron spacer. The SOI photonic structures are produced in a CMOS environment using 248 nm DUV lithography. The waveguides as well as the width modulated mirror regions are designed using a single mask and are fabricated in a shallow trench process. The transmission spectra of these width modulated micro-cavities with different mirror reflectivities and cavity lengths are investigated. Q-factors up to 855 could be observed at 1550 nm wavelength with low insertion loss of 1.9 dB. The width modulated micro-cavities, including the mirror regions, have lengths of less than 20 microns and widths of maximum 450 nm. These small foot-print cavities act as band pass filters and can be used as resonators for laser or electro-optic modulation of light.}, language = {en} }