@article{BauerFursenkoMarschmeyeretal.2019, author = {Joachim Bauer and Oksana Fursenko and Steffen Marschmeyer and Friedhelm Heinrich and Francesco Villasmunta and Claus Villringer and Christoph Zesch and Sigurd Schrader}, title = {Spectroscopic reflectometry for characterization of Through Silicon Via profile of Bosch etching process}, journal = {Journal of Vacuum Science \& Technology B}, volume = {37}, number = {6}, year = {2019}, }