@inproceedings{BauerHeinrichFursenkoetal.2017, author = {Joachim Bauer and Friedhelm Heinrich and Oksana Fursenko and Steffen Marschmeyer and Adrian Bluemich and Silvio Pulwer and Patrick Steglich and Claus Villringer and Andreas Mai and Sigurd Schrader}, title = {Very high aspect ratio through silicon via reflectometry}, booktitle = {Proceedings of SPIE}, year = {2017}, }