@inproceedings{GeislerBauerHaaketal.2008, author = {Sebastian Geisler and Joachim Bauer and Ulrich Haak and Ulrich A. Jagdhold and R. Pliquett and E. Matthus and R. Schrader and H. Wolf and U. Baetz and Harald Beyer and Martin Niehoff}, title = {Optical proximity correction for 0.13 um SiGe:C BiCMOS}, pages = {376 -- 381}, year = {2008}, }