@article{GerhardLetienCressentetal.2020, author = {Christoph Gerhard and Emilie Letien and Thomas Cressent and Mandy Hofmann}, title = {Inline monitoring of hydrogenous plasma-induced defect formation within fused silica via plasma emission spectroscopy}, journal = {Applied Physics A: Materials Science and Processing}, volume = {126}, doi = {10.1007/s00339-020-3347-5}, year = {2020}, }