@article{FursenkoLukosiusBaueretal.2019, author = {Oksana Fursenko and Mindaugas Lukosius and Joachim Bauer and Claus Villringer and Helge Lux and Florian B{\"a}rwolf and Marco Lisker and Andreas Mai}, title = {Diagnostic of graphene on Ge(100)/Si(100) in a 200 mm wafer Si technology environment by spectroscopic ellipsometry/reflectometry}, journal = {Journal of Vacuum Science \& Technology B}, volume = {37}, number = {6}, year = {2019}, }