TY - CONF A1 - Meister, Stefan A1 - Al-Saadi, Aws A1 - Franke, Bülent A. A1 - Mahdi, Shaimaa A1 - Szczambura, Miroslaw A1 - Kuhlow, Berndt A1 - Woggon, Ulrike A1 - Zimmermann, Lars A1 - Richter, Harald H. A1 - Stolarek, David A1 - Schrader, Sigurd A1 - Eichler, Hans J. T1 - Micro-cavities based on width modulated SOI waveguides N2 - We have designed, fabricated and investigated one-dimensional (1D) micro-cavities in Silicon-on-Insulator (SOI) waveguides. The single mode waveguides are fabricated in a 220 nm silicon device layer. The 1D micro-cavities in Fabry-Perot structure consist of two Bragg-mirror regions formed by a sinusoidal modulation of the waveguide width. The mirror regions are separated by a sub-micron spacer. The SOI photonic structures are produced in a CMOS environment using 248 nm DUV lithography. The waveguides as well as the width modulated mirror regions are designed using a single mask and are fabricated in a shallow trench process. The transmission spectra of these width modulated micro-cavities with different mirror reflectivities and cavity lengths are investigated. Q-factors up to 855 could be observed at 1550 nm wavelength with low insertion loss of 1.9 dB. The width modulated micro-cavities, including the mirror regions, have lengths of less than 20 microns and widths of maximum 450 nm. These small foot-print cavities act as band pass filters and can be used as resonators for laser or electro-optic modulation of light. KW - silicon photonics KW - CMOS KW - SOI waveguide KW - micro-cavity KW - micro-resonator KW - band-pass filter Y1 - 2011 UR - https://opus4.kobv.de/opus4-th-wildau/frontdoor/index/index/docId/1523 UR - https://nbn-resolving.org/urn:nbn:de:kobv:526-opus4-15233 SP - 199 EP - 204 PB - Society of Photo-Optical Instrumentation Engineers (SPIE) ER -