@article{GerhardDobis2021, author = {Christoph Gerhard and Alexander Dobis}, title = {Manufacturing-induced surface contaminations}, journal = {Vakuum in Forschung und Praxis}, volume = {33}, number = {1}, pages = {33 -- 37}, doi = {https://doi.org/10.1002/vipr.202100752}, year = {2021}, }