@inproceedings{SteglichPaulMaietal.2021, author = {Patrick Steglich and Martin Paul and Christian Mai and Andrea B{\"o}hme and Siegfried Bondarenko and Michael G. Weller and Andreas Mai}, title = {A monolithically integrated micro fluidic channel in a silicon-based photonic-integrated-circuit technology for biochemical sensing}, booktitle = {Proc. SPIE 11772, Optical Sensors 2021}, doi = {10.1117/12.2588791}, year = {2021}, }