@article{SteglichBondarenkoMaietal.2020, author = {Patrick Steglich and Siegfried Bondarenko and Christian Mai and Martin Paul and Michael G. Weller and Andreas Mai}, title = {CMOS-Compatible Silicon Photonic Sensor for Refractive Index Sensing Using Local Back-Side Release}, journal = {IEEE Photonics Technology Letters}, volume = {32}, number = {19}, pages = {1241 -- 1244}, year = {2020}, }