@article{KlingspornKirnerVillringeretal.2016, author = {M. Klingsporn and S. Kirner and Claus Villringer and D. Abou-Ras and Ioan Costina and M. Lehmann and B. Stannowski}, title = {Resolving the nanostructure of plasma-enhanced chemical vapor deposited nanocrystalline SiOx layers for application in solar cells}, journal = {Journal of Applied Physics}, volume = {119}, number = {22}, doi = {10.1063/1.4953566}, year = {2016}, }