@inproceedings{MeisterAlSaadiFrankeetal.2010, author = {Stefan Meister and Aws Al-Saadi and B{\"u}lent A. Franke and Shaimaa Mahdi and Berndt Kuhlow and Karsten Voigt and Bernd Tillack and Harald H. Richter and Lars Zimmermann and Viachaslau Ksianzou and Sigurd Schrader and Hans J. Eichler}, title = {Photonic crystal microcavities in SOI waveguides produced in a CMOS environment}, pages = {330 -- 339}, year = {2010}, }