A differential backside laserprobing technique for the investigation of the lateral temperature distribution in power devices
| Author: | C. Fürböck, R. Thalhammer, M. Litzenberger, Norbert SeligerORCID, D. Pogany, E. Gornik, G. Wachutka |
|---|---|
| DOI: | https://doi.org/10.1109/ISPSD.1999.764095 |
| Parent Title (English): | 11th International Symposium on Power Semiconductor Devices and ICs. ISPSD’99 Proceedings |
| Publisher: | IEEE |
| Document Type: | Conference Publication |
| Language: | English |
| Publication Year: | 1999 |
| Release Date: | 2023/06/15 |
| Tag: | backside laserprobing |
| First Page: | 193 |
| Last Page: | 196 |
| Peer reviewed: | Ja |
| faculties / departments: | Fakultät für Ingenieurwissenschaften |
| Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 60 Technik / 600 Technik, Technologie |
