Internal characterization of IGBTs using the backside laser probing technique - Interpretation of measurement by numerical simulation
| Author: | R. Thalhammer, C. Fuerboeck, Norbert SeligerORCID, G. Deboy, E. Gornik, G. Wachutka |
|---|---|
| DOI: | https://doi.org/10.1109/ISPSD.1998.702668 |
| Parent Title (English): | Proceedings of the 10th International Symposium on Power Semiconductor Devices and ICs (Proc. of ISPSD) |
| Document Type: | Conference Publication |
| Language: | English |
| Publication Year: | 1998 |
| Release Date: | 2023/06/09 |
| Page Number: | 4 |
| First Page: | 199 |
| Last Page: | 202 |
| faculties / departments: | Fakultät für Ingenieurwissenschaften |
