Study of Thermal Effects in GaAs Micromachined Power Sensor Microsystems by an Optical Interferometer Technique
| Author: | D. Pogany, Norbert SeligerORCID, T. Lalinsky, J. Kuzmik, P. Habas, P. Hrkut, E. Gornik |
|---|---|
| DOI: | https://doi.org/10.1016/S0026-2692(97)00057-8 |
| Parent Title (English): | Microelectronics Journal |
| Document Type: | Article (peer reviewed) |
| Language: | English |
| Publication Year: | 1998 |
| Release Date: | 2023/06/09 |
| Volume: | 29 |
| Issue: | 4-5 |
| Page Number: | 8 |
| First Page: | 191 |
| Last Page: | 198 |
| faculties / departments: | Fakultät für Ingenieurwissenschaften |
