Characterisation of Semiconductor Devices by Infrared Laser Interferometry
| Author: | Norbert SeligerORCID, E. Gornik, D. Pogany, C. Fuerboeck, P. Habas, R. Thalhammer, M. Stoisiek |
|---|---|
| DOI: | https://doi.org/10.1007/BF03159611 |
| Parent Title (English): | E&I Elektrotechnik und Informationstechnik, Sonderheft Trends in der Mikrotechnik |
| Document Type: | Article (peer reviewed) |
| Language: | English |
| Publication Year: | 1998 |
| Release Date: | 2023/06/09 |
| Issue: | 7-8 |
| Page Number: | 1 |
| First Page: | 403 |
| Last Page: | 403 |
| faculties / departments: | Fakultät für Ingenieurwissenschaften |
