Backside laserprober characterization of thermal effects during high current stress in smart power ESD protection devices
| Author: | C. Fuerboeck, Norbert SeligerORCID, D. Pogany, M. Litzenberger, E. Gornik, M. Stecher, H. Gosser, W. Werner |
|---|---|
| DOI: | https://doi.org/10.1109/IEDM.1998.746451 |
| Parent Title (English): | International Electron Devices Meeting (IEDM ’98) Technical Digest |
| Document Type: | Article (peer reviewed) |
| Language: | English |
| Publication Year: | 1998 |
| Release Date: | 2023/06/09 |
| Page Number: | 4 |
| First Page: | 691 |
| Last Page: | 694 |
| faculties / departments: | Fakultät für Ingenieurwissenschaften |
