Backside-Laserprober Technique for Characterisation of Semiconductor Power Devices
| Author: | Norbert SeligerORCID, C. Fuerboeck, P. Habas, D. Pogany, E. Gornik |
|---|---|
| Parent Title (English): | Proceedings of the Seminar Basics and Technology of Electronic Devices |
| Document Type: | Part of a Book |
| Language: | English |
| Publication Year: | 1997 |
| Release Date: | 2023/06/09 |
| Page Number: | 5 |
| First Page: | 143 |
| Last Page: | 147 |
| faculties / departments: | Fakultät für Ingenieurwissenschaften |
