A study of backside laser-probe signals in MOSFETs
| Author: | Norbert SeligerORCID, Predrag Habaš, Erich Gornik |
|---|---|
| DOI: | https://doi.org/10.1016/0167-9317(95)00329-0 |
| Parent Title (English): | Microelectronic Engineering |
| Document Type: | Article (peer reviewed) |
| Language: | English |
| Publication Year: | 1996 |
| Release Date: | 2023/06/09 |
| Volume: | 31 |
| Issue: | 1-4 |
| Page Number: | 8 |
| First Page: | 87 |
| Last Page: | 94 |
| faculties / departments: | Fakultät für Ingenieurwissenschaften |
