Study of thermal effects in GaAs micromachined power sensor microsystems by an optical interferometer technique
| Author: | D. Pogany, Norbert SeligerORCID, T. Lalinsky, J. Kuzmik, P. Habas, P. Hrkut, E. Gornik |
|---|---|
| Parent Title (English): | International Workshop on Thermal Investigation of ICs and Systems (THERMINIC' 96) |
| Document Type: | Conference Publication |
| Language: | English |
| Publication Year: | 1996 |
| Release Date: | 2023/06/09 |
| Page Number: | 6 |
| First Page: | 185 |
| Last Page: | 190 |
| faculties / departments: | Fakultät für Ingenieurwissenschaften |
