Power Sensor Microsystems Characterization using a contactless optical laser method
| Author: | D. Pogany, T. Lalinsky, Norbert SeligerORCID, J. Kuzmik, P. Habas, P. Hrkut, E. Gornik |
|---|---|
| Parent Title (English): | International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM' 96) |
| Document Type: | Conference Publication |
| Language: | English |
| Publication Year: | 1996 |
| Release Date: | 2023/06/09 |
| Page Number: | 4 |
| First Page: | 201 |
| Last Page: | 204 |
| faculties / departments: | Fakultät für Ingenieurwissenschaften |
