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Characterisation of Semiconductor Devices by Infrared Laser Interferometry

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Author:Norbert SeligerORCiD, E. Gornik, D. Pogany, C. Fuerboeck, P. Habas, R. Thalhammer, M. Stoisiek
DOI:https://doi.org/10.1007/BF03159611
Parent Title (English):E&I Elektrotechnik und Informationstechnik, Sonderheft Trends in der Mikrotechnik
Document Type:Article (peer reviewed)
Language:English
Publication Year:1998
Issue:7-8
Page Number:1
First Page:403
Last Page:403
faculties / departments:Fakultät für Ingenieurwissenschaften