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Study of Thermal Effects in GaAs Micromachined Power Sensor Microsystems by an Optical Interferometer Technique

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Author:D. Pogany, Norbert SeligerORCiD, T. Lalinsky, J. Kuzmik, P. Habas, P. Hrkut, E. Gornik
DOI:https://doi.org/10.1016/S0026-2692(97)00057-8
Parent Title (English):Microelectronics Journal
Document Type:Article (peer reviewed)
Language:English
Publication Year:1998
Volume:29
Issue:4-5
Page Number:8
First Page:191
Last Page:198
faculties / departments:Fakultät für Ingenieurwissenschaften