A differential backside laserprobing technique for the investigation of the lateral temperature distribution in power devices
Author: | C. Fürböck, R. Thalhammer, M. Litzenberger, Norbert SeligerORCiD, D. Pogany, E. Gornik, G. Wachutka |
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DOI: | https://doi.org/10.1109/ISPSD.1999.764095 |
Parent Title (English): | 11th International Symposium on Power Semiconductor Devices and ICs. ISPSD’99 Proceedings |
Publisher: | IEEE |
Document Type: | Conference Proceeding |
Language: | English |
Publication Year: | 1999 |
Tag: | backside laserprobing |
First Page: | 193 |
Last Page: | 196 |
Peer reviewed: | Ja |
faculties / departments: | Fakultät für Ingenieurwissenschaften |
Dewey Decimal Classification: | 6 Technik, Medizin, angewandte Wissenschaften / 60 Technik / 600 Technik, Technologie |