Study of thermal effects in GaAs micromachined power sensor microsystems by an optical interferometer technique
Author: | D. Pogany, Norbert SeligerORCiD, T. Lalinsky, J. Kuzmik, P. Habas, P. Hrkut, E. Gornik |
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Parent Title (English): | International Workshop on Thermal Investigation of ICs and Systems (THERMINIC' 96) |
Document Type: | Conference Proceeding |
Language: | English |
Publication Year: | 1996 |
Page Number: | 6 |
First Page: | 185 |
Last Page: | 190 |
faculties / departments: | Fakultät für Ingenieurwissenschaften |