Thermal Simulation and characterization of GaAs micromachined power sensor microsystems
Author: | E. Burian, D. Pogany, T. Lalinsky, Norbert SeligerORCiD, E. Gornik |
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Parent Title (English): | Eurosensors XI |
Document Type: | Conference Proceeding |
Language: | English |
Publication Year: | 1997 |
Page Number: | 4 |
First Page: | 949 |
Last Page: | 952 |
faculties / departments: | Fakultät für Ingenieurwissenschaften |