Characterisation of Semiconductor Devices by Infrared Laser Interferometry
Author: | Norbert SeligerORCiD, E. Gornik, D. Pogany, C. Fuerboeck, P. Habas, R. Thalhammer, M. Stoisiek |
---|---|
DOI: | https://doi.org/10.1007/BF03159611 |
Parent Title (English): | E&I Elektrotechnik und Informationstechnik, Sonderheft Trends in der Mikrotechnik |
Document Type: | Article (peer reviewed) |
Language: | English |
Publication Year: | 1998 |
Issue: | 7-8 |
Page Number: | 1 |
First Page: | 403 |
Last Page: | 403 |
faculties / departments: | Fakultät für Ingenieurwissenschaften |