Study of Thermal Effects in GaAs Micromachined Power Sensor Microsystems by an Optical Interferometer Technique
Author: | D. Pogany, Norbert SeligerORCiD, T. Lalinsky, J. Kuzmik, P. Habas, P. Hrkut, E. Gornik |
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DOI: | https://doi.org/10.1016/S0026-2692(97)00057-8 |
Parent Title (English): | Microelectronics Journal |
Document Type: | Article (peer reviewed) |
Language: | English |
Publication Year: | 1998 |
Volume: | 29 |
Issue: | 4-5 |
Page Number: | 8 |
First Page: | 191 |
Last Page: | 198 |
faculties / departments: | Fakultät für Ingenieurwissenschaften |