A study of backside laser-probe signals in MOSFETs
Author: | Norbert SeligerORCiD, Predrag Habaš, Erich Gornik |
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DOI: | https://doi.org/10.1016/0167-9317(95)00329-0 |
Parent Title (English): | Microelectronic Engineering |
Document Type: | Article (peer reviewed) |
Language: | English |
Publication Year: | 1996 |
Volume: | 31 |
Issue: | 1-4 |
Page Number: | 8 |
First Page: | 87 |
Last Page: | 94 |
faculties / departments: | Fakultät für Ingenieurwissenschaften |