Power Sensor Microsystems Characterization using a contactless optical laser method
Author: | D. Pogany, T. Lalinsky, Norbert SeligerORCiD, J. Kuzmik, P. Habas, P. Hrkut, E. Gornik |
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Parent Title (English): | International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM' 96) |
Document Type: | Conference Proceeding |
Language: | English |
Publication Year: | 1996 |
Page Number: | 4 |
First Page: | 201 |
Last Page: | 204 |
faculties / departments: | Fakultät für Ingenieurwissenschaften |