TY - CHAP A1 - Pogany, D. A1 - Seliger, Norbert A1 - Lalinsky, T. A1 - Kuzmik, J. A1 - Habas, P. A1 - Hrkut, P. A1 - Gornik, E. T1 - Study of thermal effects in GaAs micromachined power sensor microsystems by an optical interferometer technique T2 - International Workshop on Thermal Investigation of ICs and Systems (THERMINIC' 96) Y1 - 2023 SP - 185 EP - 190 ER - TY - CHAP A1 - Pogany, D. A1 - Lalinsky, T. A1 - Seliger, Norbert A1 - Kuzmik, J. A1 - Habas, P. A1 - Hrkut, P. A1 - Gornik, E. T1 - Power Sensor Microsystems Characterization using a contactless optical laser method T2 - International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM' 96) Y1 - 2023 SP - 201 EP - 204 ER - TY - JOUR A1 - Pogany, D. A1 - Seliger, Norbert A1 - Lalinsky, T. A1 - Kuzmik, J. A1 - Habas, P. A1 - Hrkut, P. A1 - Gornik, E. T1 - Study of Thermal Effects in GaAs Micromachined Power Sensor Microsystems by an Optical Interferometer Technique JF - Microelectronics Journal Y1 - 2023 U6 - https://doi.org/10.1016/S0026-2692(97)00057-8 VL - 29 IS - 4-5 SP - 191 EP - 198 ER -