TY - CHAP A1 - Seliger, Norbert A1 - Fuerboeck, C. A1 - Habas, P. A1 - Pogany, D. A1 - Gornik, E. T1 - Backside-Laserprober Technique for Characterisation of Semiconductor Power Devices T2 - Proceedings of the Seminar Basics and Technology of Electronic Devices Y1 - 2023 SP - 143 EP - 147 ER -