TY - JOUR A1 - Fuerboeck, C. A1 - Seliger, Norbert A1 - Pogany, D. A1 - Litzenberger, M. A1 - Gornik, E. A1 - Stecher, M. A1 - Gosser, H. A1 - Werner, W. T1 - Backside laserprober characterization of thermal effects during high current stress in smart power ESD protection devices JF - International Electron Devices Meeting (IEDM ’98) Technical Digest Y1 - 2023 U6 - https://doi.org/10.1109/IEDM.1998.746451 SP - 691 EP - 694 ER -