TY - JOUR A1 - Seliger, Norbert A1 - Habaš, Predrag A1 - Gornik, Erich T1 - A study of backside laser-probe signals in MOSFETs JF - Microelectronic Engineering Y1 - 2023 U6 - https://doi.org/10.1016/0167-9317(95)00329-0 VL - 31 IS - 1-4 SP - 87 EP - 94 ER -