TY - JOUR A1 - Seliger, Norbert A1 - Gornik, E. A1 - Pogany, D. A1 - Fuerboeck, C. A1 - Habas, P. A1 - Thalhammer, R. A1 - Stoisiek, M. T1 - Characterisation of Semiconductor Devices by Infrared Laser Interferometry JF - E&I Elektrotechnik und Informationstechnik, Sonderheft Trends in der Mikrotechnik Y1 - 2023 U6 - https://doi.org/10.1007/BF03159611 IS - 7-8 SP - 403 EP - 403 ER - TY - JOUR A1 - Pogany, D. A1 - Seliger, Norbert A1 - Lalinsky, T. A1 - Kuzmik, J. A1 - Habas, P. A1 - Hrkut, P. A1 - Gornik, E. T1 - Study of Thermal Effects in GaAs Micromachined Power Sensor Microsystems by an Optical Interferometer Technique JF - Microelectronics Journal Y1 - 2023 U6 - https://doi.org/10.1016/S0026-2692(97)00057-8 VL - 29 IS - 4-5 SP - 191 EP - 198 ER - TY - CHAP A1 - Burian, E. A1 - Pogany, D. A1 - Lalinsky, T. A1 - Seliger, Norbert A1 - Gornik, E. T1 - Thermal Simulation and characterization of GaAs micromachined power sensor microsystems T2 - Eurosensors XI Y1 - 2023 SP - 949 EP - 952 ER - TY - CHAP A1 - Fuerboeck, C. A1 - Thalhammer, R. A1 - Seliger, Norbert A1 - Pogany, D. A1 - Deboy, G. A1 - Wachutka, G. A1 - Gornik, E. T1 - Lokale Temperaturbestimmung in Insulated Gate Bipolar Transistoren (IGBTs) mittels Lasersondentechnik T2 - Beiträge der Informationstagung ME 97 OVE-Schriftenreihe; Nr. 14 (ISBN 3-85133-010-2) Y1 - 2023 UR - https://d-nb.info/960109242/04 VL - 14 SP - 117 EP - 122 ER - TY - JOUR A1 - Seliger, Norbert A1 - Pogany, D. A1 - Fuerboeck, C. A1 - Habas, P. A1 - Gornik, E. T1 - A laser beam method for evaluation of thermal time constant in smart power devices JF - Microelectronics Reliability Y1 - 2023 U6 - https://doi.org/10.1016/S0026-2714(97)00149-2 VL - 37 IS - 10/11 SP - 1727 EP - 1730 ER - TY - CHAP A1 - Pogany, D. A1 - Fuerboeck, C. A1 - Seliger, Norbert A1 - Habas, P. A1 - Gornik, E. A1 - Kubicek, S. A1 - Decoutere, S. ED - Grünbacher, H. T1 - Optical Testing of submicron-technology MOSFETs and bipolar transistors T2 - European Solid-State Device Research Conference (ESSDERC' 97) Y1 - 2023 UR - https://ieeexplore.ieee.org/document/1503373 SP - 372 EP - 375 ER - TY - CHAP A1 - Seliger, Norbert A1 - Pogany, D. A1 - Fuerboeck, C. A1 - Habas, P. A1 - Gornik, E. A1 - Stoisiek, M. ED - Grünbacher, H. T1 - A study of temperature distribution in SOI-smart power devices in transient conditions by optical interferometry T2 - 27th European Solid-State Device Research Conference (ESSDERC' 97) Y1 - 2023 UR - https://ieeexplore.ieee.org/document/1503408 SP - 372 EP - 375 ER - TY - CHAP A1 - Seliger, Norbert A1 - Fuerboeck, C. A1 - Habas, P. A1 - Pogany, D. A1 - Gornik, E. T1 - Backside-Laserprober Technique for Characterisation of Semiconductor Power Devices T2 - Proceedings of the Seminar Basics and Technology of Electronic Devices Y1 - 2023 SP - 143 EP - 147 ER - TY - JOUR A1 - Seliger, Norbert A1 - Habas, P. A1 - Pogany, D. A1 - Gornik, E. T1 - Time-Resolved Analysis of Self-Heating in Power VDMOSFETs Using Backside-Laserprobing JF - Solid-State Electronics Y1 - 2023 U6 - https://doi.org/10.1016/S0038-1101(97)00131-7 VL - 41 IS - 9 SP - 1285 EP - 1292 ER - TY - JOUR A1 - Fuerboeck, C. A1 - Seliger, Norbert A1 - Pogany, D. A1 - Litzenberger, M. A1 - Gornik, E. A1 - Stecher, M. A1 - Gosser, H. A1 - Werner, W. T1 - Backside laserprober characterization of thermal effects during high current stress in smart power ESD protection devices JF - International Electron Devices Meeting (IEDM ’98) Technical Digest Y1 - 2023 U6 - https://doi.org/10.1109/IEDM.1998.746451 SP - 691 EP - 694 ER - TY - JOUR A1 - Pogany, D. A1 - Seliger, Norbert A1 - Gornik, E. A1 - Stoisiek, M. A1 - Lalinsky, T. T1 - Analysis of the temperature evolution from the time resolved thermo-optical interferometric measurements with few Fabry-Perot peaks JF - Journal of Applied Physics Y1 - 2023 U6 - https://doi.org/10.1063/1.368674 VL - 84 IS - 8 SP - 4495 EP - 4501 ER - TY - CHAP A1 - Pogany, D. A1 - Lalinsky, T. A1 - Seliger, Norbert A1 - Kuzmik, J. A1 - Habas, P. A1 - Hrkut, P. A1 - Gornik, E. T1 - Power Sensor Microsystems Characterization using a contactless optical laser method T2 - International Conference on Advanced Semiconductor Devices and Microsystems (ASDAM' 96) Y1 - 2023 SP - 201 EP - 204 ER - TY - CHAP A1 - Pogany, D. A1 - Seliger, Norbert A1 - Lalinsky, T. A1 - Kuzmik, J. A1 - Habas, P. A1 - Hrkut, P. A1 - Gornik, E. T1 - Study of thermal effects in GaAs micromachined power sensor microsystems by an optical interferometer technique T2 - International Workshop on Thermal Investigation of ICs and Systems (THERMINIC' 96) Y1 - 2023 SP - 185 EP - 190 ER - TY - CHAP A1 - Seliger, Norbert A1 - Habas, P. A1 - Koeck, A. A1 - Pogany, D. A1 - Gornik, E. T1 - Backside laserprobing of transient heating in power VDMOSFETs T2 - International Seminar on Power Semiconductors (ISPS) Y1 - 2023 SP - 115 EP - 122 ER - TY - CHAP A1 - Fürböck, C. A1 - Thalhammer, R. A1 - Litzenberger, M. A1 - Seliger, Norbert A1 - Pogany, D. A1 - Gornik, E. A1 - Wachutka, G. T1 - Internal Characterisation of IGBTs Using the Backside Laserprober Technique T2 - Jahrestagung der GMe, Bad Hofgastein Tagungsband 1999 KW - IGBT Y1 - 1999 SN - 3-901678-04-8 PB - Gesellschaft für Mikroelektronik (GMe) ER - TY - JOUR A1 - Fürböck, C. A1 - Litzenberger, M. A1 - Pogany, D. A1 - Gornik, E. A1 - Seliger, Norbert A1 - Müller-Lynch, T. A1 - Stecher, M. A1 - Goßner, H. A1 - Werner, W. T1 - Laser interferometric method for ns-time scale thermal mapping of Smart Power ESD protection devices during ESD stress JF - Microelectronics Reliability Y1 - 2023 U6 - https://doi.org/10.1016/S0026-2714(99)00124-9 SN - 0026-2714 VL - 39 IS - 6 SP - 925 EP - 930 ER - TY - JOUR A1 - Pogany, D. A1 - Seliger, Norbert A1 - Litzenberger, M. A1 - Gossner, H. A1 - Stecher, M. A1 - Müller-Lynch, T. A1 - Werner, W. A1 - Gornik, E. T1 - Damage analysis in smart-power technology electrostatic discharge (ESD) protection devices JF - Microelectronics Reliability Y1 - 2023 U6 - https://doi.org/10.1016/S0026-2714(99)00162-6 SN - 0026-2714 VL - 39 IS - 6 SP - 1143 EP - 1148 ER - TY - CHAP A1 - Fürböck, C. A1 - Thalhammer, R. A1 - Litzenberger, M. A1 - Seliger, Norbert A1 - Pogany, D. A1 - Gornik, E. A1 - Wachutka, G. T1 - A differential backside laserprobing technique for the investigation of the lateral temperature distribution in power devices T2 - 11th International Symposium on Power Semiconductor Devices and ICs. ISPSD’99 Proceedings KW - backside laserprobing Y1 - 2023 U6 - https://doi.org/10.1109/ISPSD.1999.764095 SP - 193 EP - 196 PB - IEEE ER - TY - CHAP A1 - Fürböck, C. A1 - Pogany, D. A1 - Litzenberger, M. A1 - Gornik, E. A1 - Seliger, Norbert A1 - Gossner, H. A1 - Müller-Lynch, T. A1 - Stecher, M. A1 - Werner, W. T1 - Interferometric temperature mapping during ESD stress and failure analysis of smart power technology ESD protection devices T2 - Electrical Overstress/Electrostatic Discharge Symposium Proceedings KW - ESD KW - smart power device Y1 - 2023 U6 - https://doi.org/10.1109/EOSESD.1999.819067 SP - 241 EP - 250 PB - IEEE ER - TY - JOUR A1 - Fürböck, C. A1 - Pogany, D. A1 - Litzenberger, M. A1 - Gornik, E. A1 - Seliger, Norbert A1 - Gossner, H. A1 - Müller-Lynch, T. A1 - Stecher, M. A1 - Werner, W. T1 - Interferometric temperature mapping during ESD stress and failure analysis of smart power technology ESD protection devices JF - Journal of Electrostatics KW - ESD KW - smart power device Y1 - 2023 VL - 49 SP - 195 EP - 213 ER -