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    <id>2201</id>
    <completedYear>1997</completedYear>
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    <thesisYearAccepted/>
    <language>eng</language>
    <pageFirst>372</pageFirst>
    <pageLast>375</pageLast>
    <pageNumber>4</pageNumber>
    <edition/>
    <issue/>
    <volume/>
    <type>conferenceobject</type>
    <publisherName/>
    <publisherPlace/>
    <creatingCorporation/>
    <contributingCorporation/>
    <belongsToBibliography>0</belongsToBibliography>
    <completedDate>--</completedDate>
    <publishedDate>2023-06-09</publishedDate>
    <thesisDateAccepted>--</thesisDateAccepted>
    <title language="eng">Optical Testing of submicron-technology MOSFETs and bipolar transistors</title>
    <parentTitle language="eng">European Solid-State Device Research Conference (ESSDERC' 97)</parentTitle>
    <identifier type="url">https://ieeexplore.ieee.org/document/1503373</identifier>
    <enrichment key="opus.import.data">@INPROCEEDINGSpubli-7, author = D. Pogany and C. Fuerboeck and N. Seliger and P. Habas and E. Gornik and S. Kubicek and S. Decoutere, title = Optical Testing of submicron-technology MOSFETs and bipolar transistors, booktitle = ESSDERC' 97, year = 1997, editor = H. Grünbacher, pages = 372-375, address = Stuttgart, month = September, publisher = Editions Frontieres,</enrichment>
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    <enrichment key="opus.import.date">2023-06-01T13:47:06+00:00</enrichment>
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    <author>D. Pogany</author>
    <author>C. Fuerboeck</author>
    <author>Norbert Seliger</author>
    <author>P. Habas</author>
    <author>E. Gornik</author>
    <author>S. Kubicek</author>
    <author>S. Decoutere</author>
    <collection role="institutes" number="">Fakultät für Ingenieurwissenschaften</collection>
    <thesisPublisher>Technische Hochschule Rosenheim</thesisPublisher>
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