@inproceedings{PoganyFuerboeckSeligeretal.1997, author = {Pogany, D. and Fuerboeck, C. and Seliger, Norbert and Habas, P. and Gornik, E. and Kubicek, S. and Decoutere, S.}, title = {Optical Testing of submicron-technology MOSFETs and bipolar transistors}, series = {European Solid-State Device Research Conference (ESSDERC' 97)}, booktitle = {European Solid-State Device Research Conference (ESSDERC' 97)}, editor = {Gr{\"u}nbacher, H.}, pages = {372 -- 375}, year = {1997}, language = {en} }