@article{SeligerHabašGornik1996, author = {Seliger, Norbert and Habaš, Predrag and Gornik, Erich}, title = {A study of backside laser-probe signals in MOSFETs}, series = {Microelectronic Engineering}, volume = {31}, journal = {Microelectronic Engineering}, number = {1-4}, doi = {10.1016/0167-9317(95)00329-0}, pages = {87 -- 94}, year = {1996}, language = {en} }