@inproceedings{ShurSladeYtterdaletal.1997, author = {Shur, M.S. and Slade, Holly C. and Ytterdal, T. and Wang, L. and Xu, Z. and Aflatooni, K. and Byun, Y. and Chen, Y. and Froggatt, M. and Krishnan, A. and Mei, P. and Meiling, H. and Min, B.-H. and Nathan, A. and Sherman, S. and Stewart, M. and Theiss, S.D.}, title = {Modeling and Scaling of a-Si:H and poly-Si Thin Film Transistors}, series = {Materials Research Society, Proceedings, Amorphous Silicon Technology}, booktitle = {Materials Research Society, Proceedings, Amorphous Silicon Technology}, year = {1997}, language = {en} }