@inproceedings{KarlingerDittelBuerkle2015, author = {Karlinger, Peter and Dittel, G. and B{\"u}rkle, E.}, title = {Benedigtbeuerer Reinraumtage}, series = {Benedigtbeuerer Reinraumtage, Tagungshandb{\"u}cher, 2002 - 2015.}, booktitle = {Benedigtbeuerer Reinraumtage, Tagungshandb{\"u}cher, 2002 - 2015.}, year = {2015}, language = {de} }