@inproceedings{F{\"u}rb{\"o}ckThalhammerLitzenbergeretal.1999,
  author    = {F{\"u}rb{\"o}ck, C. and Thalhammer, R. and Litzenberger, M. and Seliger, Norbert and Pogany, D. and Gornik, E. and Wachutka, G.},
  title     = {Internal Characterisation of IGBTs Using the Backside Laserprober Technique},
  booktitle = {Jahrestagung der GMe, Bad Hofgastein Tagungsband 1999},
  publisher = {Gesellschaft f{\"u}r Mikroelektronik (GMe)},
  isbn      = {3-901678-04-8},
  institution = {Fakult{\"a}t f{\"u}r Ingenieurwissenschaften},
  year      = {1999},
  language  = {en}
}