TY  - CPAPER
U1  - Konferenzveröffentlichung
A1  - Burian, E.
A1  - Pogany, D.
A1  - Lalinsky, T.
A1  - Seliger, Norbert
A1  - Gornik, E.
T1  - Thermal Simulation and characterization of GaAs micromachined power sensor microsystems
T2  - Eurosensors XI
Y1  - 2023
SP  - 949
EP  - 952
S1  - 4
ER  -