@inproceedings{BurianPoganyLalinskyetal.2023, author = {Burian, E. and Pogany, D. and Lalinsky, T. and Seliger, Norbert and Gornik, E.}, title = {Thermal Simulation and characterization of GaAs micromachined power sensor microsystems}, booktitle = {Eurosensors XI}, institution = {Fakult{\"a}t f{\"u}r Ingenieurwissenschaften}, pages = {949 -- 952}, year = {2023}, language = {en} }