@article{SeligerGornikPoganyetal.1998, author = {Norbert Seliger and E. Gornik and D. Pogany and C. Fuerboeck and P. Habas and R. Thalhammer and M. Stoisiek}, title = {Characterisation of Semiconductor Devices by Infrared Laser Interferometry}, journal = {E\&I Elektrotechnik und Informationstechnik, Sonderheft Trends in der Mikrotechnik}, number = {7-8}, pages = {403 -- 403}, doi = {10.1007/BF03159611}, year = {1998}, }