TY - CONF A1 - Fürböck, C. A1 - Thalhammer, R. A1 - Litzenberger, M. A1 - Seliger, Norbert A1 - Pogany, D. A1 - Gornik, E. A1 - Wachutka, G. T1 - A differential backside laserprobing technique for the investigation of the lateral temperature distribution in power devices T2 - 11th International Symposium on Power Semiconductor Devices and ICs. ISPSD’99 Proceedings KW - backside laserprobing Y1 - 2023 UR - https://opus4.kobv.de/opus4-rosenheim/frontdoor/index/index/docId/2242 SP - 193 EP - 196 PB - IEEE ER -