TY - JOUR A1 - Seliger, Norbert A1 - Gornik, E. A1 - Pogany, D. A1 - Fuerboeck, C. A1 - Habas, P. A1 - Thalhammer, R. A1 - Stoisiek, M. T1 - Characterisation of Semiconductor Devices by Infrared Laser Interferometry T2 - E&I Elektrotechnik und Informationstechnik, Sonderheft Trends in der Mikrotechnik Y1 - 2023 UR - https://opus4.kobv.de/opus4-rosenheim/frontdoor/index/index/docId/2208 IS - 7-8 SP - 403 EP - 403 ER -