TY - CONF A1 - Burian, E. A1 - Pogany, D. A1 - Lalinsky, T. A1 - Seliger, Norbert A1 - Gornik, E. T1 - Thermal Simulation and characterization of GaAs micromachined power sensor microsystems T2 - Eurosensors XI Y1 - 2023 UR - https://opus4.kobv.de/opus4-rosenheim/frontdoor/index/index/docId/2198 SP - 949 EP - 952 ER -